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- egee-523a - vlsi-and-nano-technology-and-devices
California State University-Fullerton Course Info
Fullerton, California
Course Info
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EGEE 523A
VLSI and Nano Technology and Devices
Silicon crystal, PN junction physics, oxide and interface physics and wafer fabrication technology; oxidation, diffusion, ion-implantation, epitaxy, photolithography and thin films process. Layout design principle for integrated circuits. Nano-electronic devices and technology
Units: 3.0
Prerequisites:
EGEE 455 - Microelectronics and Nano Devices