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Georgia Institute of Technology-Main Campus Course Info

Atlanta, Georgia

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Course Info

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ME 4766

Nanoscale Devices

Fundamental properties at the nanoscale for photonics and sensors. Nanoscale fabrication methods including thin films, ion beam, lithography, electroplating, and example case studies in NEMS/MEMS and photonics. Credit not allowed for both ME 4766 and MSE 4766.

Units: 3.0