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Georgia Institute of Technology-Main Campus Course Info

Atlanta, Georgia

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Course Info

Search for courses by clicking on letters of the alphabet or by using a search bar. Explore course description, number of credits required and course sequences to satisfy graduation requirements.

CHBE 6460

MEMS Devices

Introduces fundamental concepts and tools needed for the design, simulation and analysis of MEMS devices. These include electrical, mechanical, radiant, thermal, magnetic and chemical domains. Credit not allowed for both CHBE 6460 and ME 6460 or ECE 6460.

Units: 3.0